Modularized microelectromechanical devices as key components for advanced intelligent autonomous sensors and control systems
- Author
- SCHUENEMANN, M1 ; GROSSER, V2 ; LEUTENBAUER, R2 ; MATUSCHECK, P1 ; SCHAEFER, W1 ; REICHL, H2
[1] Fraunhofer-Institute for Manufacturing Engineering and Automation, Department of Ultrapure Engineering and Microfabrication Technology, Nobelstrasse 12, 70569 Stuttgart, Germany
[2] Fraunhofer-Institute for Mechanical Reliability and Microintegration, Department of Mechanical Reliability in Microtechnology, Gustav-Meyer-Allee 25, 13355 Berlin, Germany - Conference title
- Sensors and controls for advanced manufacturing (Pittsburgh PA, 14-15 october 1997)
- Conference name
- Sensors and controls for advanced manufacturing. Conference (Pittsburgh PA 1997-10-14)
- Author (monograph)
- Nnaji, Bartholomew O (Editor); Wang, Anbo (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 1997, pp 108-123 ; ref : 26 ref
- ISBN
- 0-8194-2633-4
- Scientific domain
- Electronics; Mechanical engineering; Metrology and instrumentation; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Conception machine Conception modulaire Dispositif électromécanique Encapsulation Miniaturisation Mécanique précision Système autonome Système contrôle commande Système intelligent
- Keyword (en)
- Machine design Modular design Electromechanical device Encapsulation Miniaturization Precision engineering Autonomous system Command and control systems Intelligent system
- Keyword (es)
- Concepción máquina Concepción modular Dispositivo electromecánico Mecánica precisión Sistema autónomo Sistema inteligente
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07T Servo and control equipment; robots
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G01 Theoretical study. Circuits analysis and design
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2040862
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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