Monotonic and fatigue testing of freestanding submicron thin beams application for MEMS
- Author
- LIN, Ming-Tzer1 ; TONG, Chi-Jia1 ; SHIU, Kai-Shiang1
[1] Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan, Province of China - Conference title
- Design, Test, Integration and Packaging of MEMS/MOEMS, Stresa-Italy, 25-27 April 2007
- Conference name
- Symposium on design, test, integration and packaging of MEMS/MOEMS (DTIP) (DTIP) (Stresa 2007-04-25)
- Author (monograph)
- COURTOIS, Bernard (Editor); MICHEL, Bernd (Editor)
- Source
Microsystem technologies. 2008, Vol 14, Num 7, pp 1041-1048, 8 p ; ref : 1/24 p
- ISSN
- 0946-7076
- Scientific domain
- Electronics; Mechanical engineering; Metrology and instrumentation
- Publisher
- Springer, Berlin
- Publication country
- Germany
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur piézoélectrique Boucle fermée Boucle réaction Cellule charge Condensateur Couche mince Cuivre Dispositif microélectromécanique Eprouvette essai Essai fatigue Etude expérimentale Fatigue Nanotechnologie Poutre cantilever Revêtement métallique Rupture Submicromètre Température ambiante Transducteur capacitif Transducteur piézoélectrique
- Keyword (en)
- Piezoelectric actuators Closed loop Feedback Load cell Capacitors Thin films Copper Microelectromechanical device Test bar Fatigue testing Experimental study Fatigue Nanotechnology Cantilever beam Metal coating Ruptures Submicrometer Ambient temperature Capacitive transducer Piezoelectric transducers
- Keyword (es)
- Bucle cerrado Célula carga Dispositivo microelectromecánico Probeta ensayo Viga cantilever Revestimiento metálico Submicrómetro Transductor capacitivo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20415560
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00542-007-0463-5 
https://dx.doi.org/10.1007/s00542-007-0463-5
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