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Monotonic and fatigue testing of freestanding submicron thin beams application for MEMS

Author
LIN, Ming-Tzer1 ; TONG, Chi-Jia1 ; SHIU, Kai-Shiang1
[1] Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan, Province of China
Conference title
Design, Test, Integration and Packaging of MEMS/MOEMS, Stresa-Italy, 25-27 April 2007
Conference name
Symposium on design, test, integration and packaging of MEMS/MOEMS (DTIP) (DTIP) (Stresa 2007-04-25)
Author (monograph)
COURTOIS, Bernard (Editor); MICHEL, Bernd (Editor)
Source

Microsystem technologies. 2008, Vol 14, Num 7, pp 1041-1048, 8 p ; ref : 1/24 p

ISSN
0946-7076
Scientific domain
Electronics; Mechanical engineering; Metrology and instrumentation
Publisher
Springer, Berlin
Publication country
Germany
Document type
Conference Paper
Language
English
Keyword (fr)
Actionneur piézoélectrique Boucle fermée Boucle réaction Cellule charge Condensateur Couche mince Cuivre Dispositif microélectromécanique Eprouvette essai Essai fatigue Etude expérimentale Fatigue Nanotechnologie Poutre cantilever Revêtement métallique Rupture Submicromètre Température ambiante Transducteur capacitif Transducteur piézoélectrique
Keyword (en)
Piezoelectric actuators Closed loop Feedback Load cell Capacitors Thin films Copper Microelectromechanical device Test bar Fatigue testing Experimental study Fatigue Nanotechnology Cantilever beam Metal coating Ruptures Submicrometer Ambient temperature Capacitive transducer Piezoelectric transducers
Keyword (es)
Bucle cerrado Célula carga Dispositivo microelectromecánico Probeta ensayo Viga cantilever Revestimiento metálico Submicrómetro Transductor capacitivo
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20415560

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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