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A novel method to fabricate single crystal nano beams with (111)-oriented Si micromachining

Author
HENG YANG1 ; KEFENG XU1 ; YONGLIANG YANG1 ; TIE LI1 ; JIWEI JIAO1 ; XINXIN LI1 ; YUELIN WANG1
[1] National Laboratory of Microsystem Technology, Shanghai Institute of Micro System and Information Technology, Chinese Academy of Sciences, Changning Road 865, 200050 Shanghai, China
Source

Microsystem technologies. 2008, Vol 14, Num 8, pp 1185-1191, 7 p ; ref : 1/4 p

ISSN
0946-7076
Scientific domain
Electronics; Mechanical engineering; Metrology and instrumentation
Publisher
Springer, Berlin
Publication country
Germany
Document type
Article
Language
English
Keyword (fr)
Connexion électrique Etude expérimentale Gravure sèche Hydroxyde de potassium Microusinage Monocristal Métal Nanotechnologie Photofabrication Photolithographie Poutre cantilever Propriété mécanique Résonateur
Keyword (en)
Electrical connection Experimental study Dry etching Potassium hydroxide Micromachining Single crystal Metal Nanotechnology Photofabrication Photolithography Cantilever beam Mechanical properties Resonator
Keyword (es)
Conexión eléctrica Estudio experimental Grabado seco Potasio hidróxido Micromaquinado Monocristal Metal Nanotecnología Fotofabricación Fotolitografía Viga cantilever Propiedad mecánica Resonador
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20439920

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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