A study on the coupled dynamic characteristics for a torsional micromirror
- Author
- JIAN PING ZHAO1 ; HUA LING CHEN1
[1] School of Mechanical Engineering, Institute of Vibration and Noise control, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China - Source
Microsystem technologies. 2005, Vol 11, Num 12, pp 1301-1309, 9 p ; ref : 1/2 p
- ISSN
- 0946-7076
- Scientific domain
- Electronics; Mechanical engineering; Metrology and instrumentation
- Publisher
- Springer, Berlin
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Author keyword
- Torsional micromirror .Dynamic characteristics .Coupling effect .Optical MEMS
- Keyword (fr)
- Dispositif microélectromécanique Effet non linéaire Micromiroir Miroir Modèle dynamique Modélisation Méthode élément fini Optique intégrée Torsion Vibration torsion
- Keyword (en)
- Microelectromechanical device Non linear effect Micromirrors Mirror Dynamic model Modeling Finite element method Integrated optics Torsion Torsional vibration
- Keyword (es)
- Dispositivo microelectromecánico Efecto no lineal Espejo Modelo dinámico Modelización Método elemento finito Optica integrada Torsión Vibración torsión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20457163
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00542-005-0613-6 
https://dx.doi.org/10.1007/s00542-005-0613-6
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