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The confocal Raman AFM : A powerful tool for the characterization of surface coatings

Author
SCHMIDT, U1 ; IBACH, W1 ; MUELLER, J1 ; HOLLRICHER, O1
[1] WITec GmbH, Hoervelsingerweg 6, 89081 Ulm, Germany
Conference title
Optical measurement systems for industrial inspection V (18-22 June 2007, Munich, Germany)
Conference name
Optical measurement systems for industrial inspection. Conference (5 ; Munich 2007)
Author (monograph)
Osten, Wolfgang (Editor); Gorecki, Christophe (Editor); Novak, Erik (Editor)
Society of photo-optical instrumentation engineers Europe (Organiser of meeting)
European optical society (Organiser of meeting)
Wissenschaftliche Gesellschaft Lasertechnik, Germany (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 2Vol, pp 66160E.1-66160E.6 ; ref : 14 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-6758-4
Scientific domain
Electronics; Metrology and instrumentation; Optics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Application industrielle Microscopie confocale Microscopie force atomique Multicouche Méthode mesure Méthode optique Résolution spatiale Spectrométrie Raman 0130C 0760P 0779L
Keyword (en)
Industrial application Confocal microscopy Atomic force microscopy Multilayers Measuring methods Optical method Spatial resolution Raman spectroscopy
Keyword (es)
Aplicación industrial Microscopía confocal Método óptico
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60P Conventional optical microscopes

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G79 Scanning probe microscopes, components and techniques / 001B00G79L Atomic force microscopes

Discipline
Metrology Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20507740

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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