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Modelling MEMS structures using Cosserat theory

Author
CALIS, M1 2 ; LAGROUCHE, O3 ; DESMULLIEZ, M. P. Y2
[1] Corac Group plc Brunel Science Park, Uxbridge, UB8 3PQ, United Kingdom
[2] School of Engineering & Physical Sciences MIcroSystems Engineering Center (MISEC) Heriot-Watt University, Eindburgh, EH14 4AS, United Kingdom
[3] School of the Built Environment Heriot-Watt University, Edinburgh, EH14 4AS, United Kingdom
Conference title
DTIP of MEMS & MOEMS (design, test, integration and packaging of MEMS-MOEMS 2007)
Conference name
Symposium on design, test, integration and packaging of MEMS-MOEMS (Nice 2008)
Source

DTIP of MEMS & MOEMS (design, test, integration and packaging of MEMS-MOEMS 2007). 2008 ; 1Vol, pp 77-79, 3 p ; ref : 12 ref

ISBN
978-2-35500-006-5
Scientific domain
Electronics; Metrology and instrumentation
Publisher
EDA publishing, Grenoble
Publication country
France
Document type
Conference Paper
Language
English
Keyword (fr)
Caractéristique dynamique Dispositif microélectromécanique Evaluation performance Matériau Cosserat Modélisation Outil logiciel Système dynamique non linéaire 4265S 8585 BioMEMS
Keyword (en)
Dynamic characteristic Microelectromechanical device Performance evaluation Cosserat material Modeling Software tool Nonlinear dynamical systems BioMEMS
Keyword (es)
Característica dinámica Dispositivo microelectromecánico Evaluación prestación Material Cosserat Modelización Herramienta software
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B65 Nonlinear optics / 001B40B65S Dynamics of nonlinear optical systems; optical instabilities, optical chaos and complexity, and optical spatio-temporal dynamics

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Discipline
Electronics Physics : optics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20508107

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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