Spectral interferometry and reflectometry used to measure thin films
- Author
- HLUBINA, P1 ; LUNACEK, J1 ; CIPRIAN, D1 ; CHLEBUS, R1
[1] Department of Physics, Technical University Ostrava, 17. listopadu 15, 70833 Ostrava-Poruba, Czech Republic - Source
Applied physics. B, Lasers and optics (Print). 2008, Vol 92, Num 2, pp 203-207, 5 p ; ref : 16 ref
- Publisher
- Springer, Berlin
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Keyword (fr)
- Constante optique Couche mince Déphasage Facteur réflexion Interférogramme Interféromètre Michelson Interférométrie optique Méthode mesure Méthode optique Reconstruction phase Réflectométrie Silicium 0760L 6855J 7820C
- Keyword (en)
- Optical constants Thin films Phase shift Reflectivity Interferogram Michelson interferometers Light interferometry Measuring methods Optical method Phase reconstruction Reflectometry Silicon
- Keyword (es)
- Figura intermitente Método óptico Reconstrucción fase
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60L Interferometers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H20 Optical properties of bulk materials and thin films / 001B70H20C Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
- Discipline
- Metrology Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20539138
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00340-008-3093-4 
https://dx.doi.org/10.1007/s00340-008-3093-4
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