Modified growth of Ge quantum dots using C₂H₄ mediation by ultra-high vacuum chemical vapor deposition

Author

LEE, S. W¹ ; CHEN, P. S² ; CHENG, S. L^{1 3} ; LEE, M. H⁴ ; CHANG, H. T¹ ; LEE, C.-H⁵ ; LIU, C. W⁵
[1] Institute of Materials Science and Engineering, National Central University, Jhong-Li 32001, Taiwan, Province of China
[2] Department of Materials Science and Engineering, Minghsin University of Science and Technology, Hsinchu 30401, Taiwan, Province of China
[3] Department of Chemical and Materials Engineering, National Central University, Jhong-Li 32001, Taiwan, Province of China
[4] Institute of Electro-optical Science and Technology, National Taiwan Normal University, Taipei 11677, Taiwan, Province of China
[5] Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan, Province of China

Conference title

Proceedings of the Fifth International Symposium on Control of Semiconductor Interfaces

Conference name

International Symposium on Control of Semiconductor Interfaces (ISCSI) (ISCSI) (5 ; Tokyo 2007-11-12)

Author (monograph)

MUROTA, Junichi (Editor)¹ ; ZAIMA, Shigeaki (Editor)² ; MOCHIZUKI, Yasunori (Editor)³ ; WASHIO, Katsuyoshi (Editor)⁴
Japan Society for the Promotion of Science (JSPS), Japan (Organiser of meeting)
[1] Tohoku University, Japan
[2] Nagoya University, Japan
[3] NEC, Japan
[4] Hitachi, Japan

Source

Applied surface science. 2008, Vol 254, Num 19, pp 6261-6264, 4 p ; ref : 18 ref

ISSN

0169-4332

Scientific domain

General chemistry, physical chemistry; Crystallography; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics

Publisher

Elsevier Science, Amsterdam

Publication country

Netherlands

Document type

Conference Paper

Language

English

Author keyword

61.72.Ff 68.37.Ps 68.65.Ac Ge,Self-assembled,Quantum dot,UHV/CVD 68.65Hb

Keyword (fr)

Autoassemblage Croissance film Dépôt chimique phase vapeur Germanium Point quantique Ultravide Ge

Keyword (en)

Self-assembly Film growth CVD Germanium Quantum dots Ultrahigh vacuum

Classification

Pascal

001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties

Pascal

001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties

Pascal

001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology

Discipline

Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties

Origin

Inist-CNRS

Database

PASCAL

INIST identifier

20569337

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