A novel noria (water-wheel-like cyclic oligomer) derivative as a chemically amplified electron-beam resist material
- Author
- KUDO, Hiroto1 ; WATANABE, Daisuke1 ; NISHIKUBO, Tadatomi1 ; MARUYAMA, Ken2 ; SHIMIZU, Daisuke2 ; KAI, Toshiyuki2 ; SHIMOKAWA, Tsutomu2 ; OBER, Christopher K3
[1] Department of Material and Life Chemistry, Faculty of Engineering, Kanagawa University, 3-27-1, Rokkakubashi, Kanagawa-ku, Yokohama, 221-8686, Japan
[2] Semiconductor Materials Laboratory, Semiconductor Materials Research Laboratories, JSR Corporation, 100 Kawajiri-cho, Yokkaichi, Mie 510-8552, Japan
[3] Department of Materials Science and Engineering, Cornell University, Bard Hall, Ithaca, NY 14853, United States - Source
Journal of material chemistry. 2008, Vol 18, Num 30, pp 3588-3592, 5 p ; ref : 22 ref
- Publisher
- Royal Society of Chemistry, Cambridge
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Acide carboxylique Couche mince Effet photoinduit Ester Faisceau électronique Oligomère Rayonnement UV Resist électronique Solubilité Solvant organique Stabilité thermique Traitement thermique 6475
- Keyword (en)
- Carboxylic acid Thin film Photoinduced effect Ester Electron beam Oligomer Ultraviolet radiation Electron resists Solubility Organic solvent Thermal stability Heat treatment
- Keyword (es)
- Acido carboxílico Capa fina Efecto fotoinducido Ester Haz electrónico Oligómero Radiación ultravioleta Solubilidad Solvente orgánico Estabilidad térmica Tratamiento térmico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60D Equations of state, phase equilibria, and phase transitions / 001B60D75 Solubility, segregation, and mixing; phase separation
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials
- Discipline
- Electronics Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20573758
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1039/b805394d 
https://dx.doi.org/10.1039/b805394d
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