A novel micromachining technique for the batch fabrication of scanning probe arrays with precisely defined tip contact areas
- Author
- KAYA YAPICI, Murat1 ; JUN ZOU1
[1] Department of Electrical and Computer Engineering, Texas A&M University, College Station, TX 77843, United States - Source
Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 8 ; 085015.1-085015.8 ; ref : 23 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Anodisation Dépendance du temps Lithographie Microusinage substrat Pointe microscope Procédé discontinu Technologie silicium sur isolant
- Keyword (en)
- Anodizing Time dependence Lithography Bulk micromachining Microscope tip Batch process Silicon on insulator technology
- Keyword (es)
- Anodización Dependencia del tiempo Litografía Micromaquinado substrato Punta microscopio Procedimiento discontínuo Tecnología silicio sobre aislante
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20588684
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/18/8/085015 
https://dx.doi.org/10.1088/0960-1317/18/8/085015
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