Integration Issues in Step and Repeat UV Nanoimprint lithography
- Author
- CHARPIN-NICOLLE, C1 ; IRMSCHER, M2 ; PRITSCHOW, M2 ; VRATZOV, B3 ; VAN HOSSEN, H4 ; CHIARONI, J1 ; MASSIN, J5 ; GUBBINI, P6
[1] CEA LETI-Minatec 17 Rue des Martyrs France, 38054 Grenoble, France
[2] STMicroelectronics, 850 Rue Jean Monnet, 38921 Crolles, France
[3] IMS CHIPS, Allmandrig 30a, 70569 Stuttgart, Germany
[4] NT&D, Wirichsbongardstrasse 24, 52062 Aachen, Germany
[5] MESA+ Research Institute, University of Twente, 7500 AE Enschede, Netherlands
[6] Molecular Imprints, 35 rue de la Monnaie, 34130 Maugio, France - Conference title
- Emerging lithographic technologies XII (26-28 February 2008, San Jose, California, USA)
- Conference name
- Emerging lithographic technologies (12 ; San Jose CA 2008)
- Author (monograph)
- Schellenberg, F. M (Editor)
SPIE, United States (Organiser of meeting)
International SEMATECH, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69212I.1-69212I.10
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7106-2
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Contact linéaire Evaluation performance Fabrication microélectronique Gravure Industrie électronique Lithographie UV Nanolithographie Pastille électronique Photolithographie Polissage Trou interconnexion
- Keyword (en)
- Line contact Performance evaluation Microelectronic fabrication Engraving Electronics industry UV lithography Nanolithography Wafer Photolithography Polishing Via hole
- Keyword (es)
- Contacto lineal Evaluación prestación Fabricación microeléctrica Grabado Industria electrónica Litografía UV Pastilla electrónica Fotolitografía Pulimiento Agujero interconexión
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03A General (including economical and industrial fields)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20620711
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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