Modelling of the filling of micro-cavities of finite geometry by amorphous polymers using hot-embossing
- Author
- SAHLI, M1 2 ; ROQUES-CARMES, C2 ; KHAN MALEK, C2 ; GELIN, J. C3
[1] Surface Microanalysis Laboratory (LMS), ENSMM, 25030 Besançon, France
[2] LPMO Department, FEMTO-ST Institute, CNRS UMR 6174, 25044 Besançon, France
[3] FEMTO-ST Institute/Applied Mechanics Department, ENSMM, 25030 Besançon, France - Conference title
- High Aspect Ratio Micro Structure Technology Workshop
- Conference name
- High Aspect Ratio Micro Structure Technology Workshop (Besançon 2007-06-07)
- Source
Microsystem technologies. 2008, Vol 14, Num 9-11, pp 1545-1551, 7 p ; ref : 1/4 p
- ISSN
- 0946-7076
- Scientific domain
- Electronics; Mechanical engineering; Metrology and instrumentation
- Publisher
- Springer, Berlin
- Publication country
- Germany
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- A chaud Cavité Etat amorphe Formage à chaud Gaufrage Matériau amorphe Microcavité Modélisation Moule Remplissage Viscoélasticité
- Keyword (en)
- Hot process Cavity Amorphous state Hot forming Embossing Amorphous material Microcavity Modeling Mold Filling Viscoelasticity
- Keyword (es)
- En caliente Cavidad Estado amorfo Termoconformado Gofrado Material amorfo Microcavidad Modelización Molde Relleno Viscoelasticidad
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A04 Machinery and processing / 001D10A04A Plastics / 001D10A04A2 Moulding
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology Polymer industry, paints, wood
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20653554
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00542-008-0565-8 
https://dx.doi.org/10.1007/s00542-008-0565-8
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