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Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates

Author
PROKOP, J1 ; FINNAH, G1 ; LORENZ, J1 ; HOTTER, V1 ; RUPRECHT, R1 ; HAUSSELT, J1
[1] Forschungszentrum Karlsruhe, IMF III, Postfach 3640, 76021 Karlsruhe, Germany
Conference title
High Aspect Ratio Micro Structure Technology Workshop
Conference name
High Aspect Ratio Micro Structure Technology Workshop (Besançon 2007-06-07)
Source

Microsystem technologies. 2008, Vol 14, Num 9-11, pp 1669-1674, 6 p ; ref : 1/4 p

ISSN
0946-7076
Scientific domain
Electronics; Mechanical engineering; Metrology and instrumentation
Publisher
Springer, Berlin
Publication country
Germany
Document type
Conference Paper
Language
English
Keyword (fr)
Dispositif microélectromécanique Dépôt électrolytique Microstructure élancée Processus fabrication
Keyword (en)
Microelectromechanical device Electrodeposition High aspect ratio microstructure HARM Production process
Keyword (es)
Dispositivo microelectromecánico Depósito electrolítico Microestructura esbelta Proceso fabricación
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20653572

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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