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A study of angular effects in focused ion beam milling of water ice

Author
JING FU1 ; JOSHI, Sanjay B1 ; CATCHMARK, Jeffrey M2
[1] Department of Industrial and Manufacturing Engineering, 310 Leonhard Building, The Pennsylvania State University, University Park, PA 16802, United States
[2] Department of Agricultural and Biological Engineering, 109 Agricultural Engineering Building, The Pennsylvania State University, University Park, PA 16802, United States
Source

Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 9 ; 095010.1-095010.8 ; ref : 23 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Composé minéral Condition opératoire Cryogénie Eau Etat surface Etude expérimentale Formation motif Fraisage Irradiation ion Microscopie électronique balayage Pulvérisation irradiation Submicromètre Technologie faisceau ion focalisé Température cryogénique Usinage
Keyword (en)
Inorganic compound Operating conditions Cryogenics Water Surface conditions Experimental study Patterning Milling Ion irradiation Scanning electron microscopy Sputtering Submicrometer Focused ion beam technology Cryogenic temperature Machining
Keyword (es)
Compuesto inorgánico Condición operatoria Criogenia Agua Estado superficie Estudio experimental Formacíon motivo Fresado Irradiación ión Microscopía electrónica barrido Pulverización irradiación Submicrómetro Temperatura criogénica Mecanizado
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20663005

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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