A versatile and flexible low-temperature full-wafer bonding process of monolithic 3D microfluidic structures in SU-8
- Author
- STEIGERT, J1 ; BRETT, O1 ; MÜLLER, C2 ; STRASSER, M1 ; WANGLER, N1 ; REINECKE, H2 3 ; DAUB, M1 ; ZENGERLE, R1 3
[1] Laboratory for MEMS Applications, Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany
[2] Laboratory for Process Technology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany
[3] HSG-IMIT, Wilhelm-Schickard-Str. 10, 78052 Villingen-Schwenningen, Germany - Source
Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 9 ; 095013.1-095013.8 ; ref : 41 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Basse température Epoxyde résine Fixation pastille Fluidique Force adhérence Membrane Microfluidique Photorésist Processus fabrication Rapport aspect Structure tunnel
- Keyword (en)
- Low temperature Epoxy resin Wafer bonding Fluidics Adhesive strength Membranes Microfluidics Photoresists Production process Aspect ratio Channel structure
- Keyword (es)
- Baja temperatura Epóxido resina Fuerza adherencia Proceso fabricación Estructura túnel
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20663008
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/18/9/095013 
https://dx.doi.org/10.1088/0960-1317/18/9/095013
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