Integration of diamond in fully-depleted silicon-on-insulator technology as buried insulator : A theoretical analysis
- Author
- MAZELLIER, Jean-Paul1 2 ; FAYNOT, Olivier1 ; CRISTOLOVEANU, Sorin2 ; DELEONIBUS, Simon1 ; BERGONZO, Philippe3
[1] CEA-LETI, CEA-Grenoble 17 rue des Martyrs, 38054 Grenoble, France
[2] IMEP-INP Grenoble MINAJEC, 3 Parvis Louis Néel BP 257, 38016 Grenoble, France
[3] CEA-LIST CEA-Saclay, 91191 Gif sur Yvette, France - Conference title
- Proceedings of Diamond 2007, the 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide
- Conference name
- European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide (Diamond) (Diamond) (18 ; Berlin 2007-09-09)
- Author (monograph)
- ROBERTSON, John (Editor)1 ; KAWARADA, Hiroshi (Editor); KOHN, Erhard (Editor); HAMERS, Robert (Editor)
[1] Engineering Department, Cambridge University, 9 JJ Thomson Ave, Cambridge CB2 1PZ, United Kingdom - Source
Diamond and related materials. 2008, Vol 17, Num 7-10, pp 1248-1251, 4 p ; ref : 22 ref
- ISSN
- 0925-9635
- Scientific domain
- Crystallography
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Diamond properties and applications Electrical properties Silicon-on-insulator (SOI) Thermal properties
- Keyword (fr)
- Capacité électrique Couche épaisse Diamant synthétique Etude théorique Oxyde de silicium Propriété thermique Propriété électrique Silicium Simulation numérique Technologie silicium sur isolant Transistor MOSFET 6860D 7350 8105U 8530T Si SiO2
- Keyword (en)
- Capacitance Thick films Synthetic diamond Theoretical study Silicon oxides Thermal properties Electrical properties Silicon Digital simulation Silicon-on-insulator MOSFET
- Keyword (es)
- Diamante sintético
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60D Thermal stability; thermal effects
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C50 Electronic transport phenomena in thin films and low-dimensional structures
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05T Fullerenes and related materials; diamonds, graphite
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F04 Transistors
- Discipline
- Electronics Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20664040
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.diamond.2008.03.026 
https://dx.doi.org/10.1016/j.diamond.2008.03.026
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