Realization of SOI submicrometer optical waveguide components
- Author
- XUEIUN XU1 ; SHAOWU CHEN1 ; JINZHONG YU1 ; XIAOGUANG TU1
[1] State Key Laboratory of Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P.O. Box 912, Beijing, 100083, China - Conference title
- Optoelectronic devices and integration II (12-15 November 2007, Beijing, China)
- Conference name
- Optoelectronic devices and integration (2 ; Beijing 2007)
- Author (monograph)
- Ming, Hai (Editor); Zhang, Xuping (Editor); Chen, Maggie Yihong (Editor)
SPIE, United States (Organiser of meeting)
Zhongguo guang xue xue hui, China (Organiser of meeting)
Nihon Kōgakkai, Ōyō Butsuri Gakkai, Japan (Organiser of meeting)
Zhongguo ke xue ji shu xie hui, China (Organiser of meeting)
Guo jia zi ran ke xue ji jin wei yuan hui, China (Organiser of meeting)
China, Guo jia ke xue ji shu bu, China (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 68380L.1-68380L.9 ; ref : 10 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7013-3
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composant guide onde optique Coupleur directionnel optique Coupleur directionnel Etude expérimentale Forme en T Gravure plasma Gravure sèche Guide onde optique Guide onde rebord Guide onde Interféromètre Interférométrie optique Lithographie faisceau électron Nanofil Perte optique Perte transmission Petite dimension Plasma couplé inductivement Propagation onde électromagnétique Technologie silicium sur isolant 0130C 0760L 4120J 4225B 4279G
- Keyword (en)
- Optical waveguide components Optical directional couplers Directional couplers Experimental study T shape Plasma etching Dry etching Optical waveguides Rib waveguides Waveguides Interferometers Light interferometry Electron beam lithography Nanowires Optical losses Transmission loss Small dimension Inductively coupled plasma Electromagnetic wave propagation Silicon-on-insulator
- Keyword (es)
- Forma de una T Grabado plasma Grabado seco Pérdida transmisión Pequeña dimensión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60L Interferometers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B25 Wave optics / 001B40B25B Wave propagation, transmission and absorption
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79G Optical waveguides and coupleurs
- Discipline
- Metrology Physics : optics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20694891
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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