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A semi-analytical model for squeeze-film damping including rarefaction in a MEMS torsion mirror with complex geometry

Author
ASHOK KUMAR PANDEY1 ; PRATAP, Rudra2
[1] Faculty of Mechanical Engineering, Center for Material Mechanics, Technion-Israel Institute of Technology, Haifa, Israel
[2] CranesSci MEMS Lab, Department of Mechanical Engineering, Indian Institute of Science, Bangalore, Kamataka, India
Source

Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 10 ; 105003.1-105003.12 ; ref : 34 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Condition aux limites Continuum Dispositif microélectromécanique Ecoulement glissant Ecoulement moléculaire Equation Navier Stokes Equation Reynolds Etude expérimentale Facteur qualité Film comprimé Gaz raréfié Miroir tournant Modèle empirique Modélisation Vibration torsion Viscosité effective
Keyword (en)
Boundary conditions Continuum Microelectromechanical device Slip flow Molecular flow Navier-Stokes equations Reynolds equation Experimental study Quality factor Squeeze film Rarefied gases Rotating mirror Empirical model Modelling Torsional vibration Effective viscosity
Keyword (es)
Continuo Dispositivo microelectromecánico Flujo molecular Ecuación Reynolds Película comprimida Espejo giratorio Modelo empírico Vibración torsión Viscosidad efectiva
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G10 General theory

Discipline
Metrology Physics : fluid mechanics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20750946

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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