Modular Integration of Microactuators and Micro-Optical Benches
- Author
- SCHÜLE, S1 ; HOLLENBACH, U1 ; MONT, J1 ; LI, J2 ; VORREAU, P2 ; EFREMOV, A2 ; LEUTHOLD, J2 ; SCHONHARDT, S3
[1] Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany
[2] Institute of High-Frequency and Quantum Electronics, University of Karlsruhe (TH), Engesserstr. 5, 76131 Karlsruhe, Germany
[3] IMTEK, Department of Microsystems Engineering, University of Freiburg, Germany - Conference title
- Micro-optics 2008 (7-9 April 2008, Strasbourg, France)
- Conference name
- Micro-optics (Strasbourg 2008)
- Author (monograph)
- Thienpont, Hugo (Editor)
Society of photo-optical instrumentation engineers Europe (Organiser of meeting)
Alsace international, France (Organiser of meeting)
Association française des industries de l'optique et de la photonique, France (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 699202.1-699202.12 ; ref : 9 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7190-1
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur Banc optique Capteur optique Dispositif microoptoélectromécanique Electroformage Elément optique Fabrication industrielle Interféromètre Mach Zehnder Interférométrie optique Mesure optique Microactionneur Microoptique Microstructure Modulation Monitorage Optique intégrée Propagation espace libre Propagation onde électromagnétique Rapport aspect Sous système Système optique Télécommunication optique 0130C 0707D 0710C 0760L 4225B 4279 4279S 8585
- Keyword (en)
- Actuators Optical bench Optical sensors Microoptoelectromechanical device Electroforming Optical elements Manufacturing Mach-Zehnder interferometers Light interferometry Optical measurement Microactuators Micro-optics Microstructure Modulation Monitoring Integrated optics Free space propagation Electromagnetic wave propagation Aspect ratio Subsystem Optical systems Optical communication
- Keyword (es)
- Banco óptico Dispositivo microoptoelectromecánico Medida óptica Monitoreo Subsistema
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60L Interferometers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B83 Micro- and nanooptical devices
- Discipline
- Metrology Physics : optics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20859016
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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