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Strained Silicon Nanowire Transistors With Germanium Source and Drain Stressors : Nanowire transistors: modeling, device, desing, and technology

Author
LIOW, Tsung-Yang1 2 ; TAN, Kian-Ming1 ; RINUS TEK PO LEE1 ; MING ZHU3 ; TAN, Ben Lian-Huat2 ; BALASUBRAMANIAN, N4 ; YEO, Yee-Chia1 5
[1] Department of Electrical and Computer Engineering, National University of Singapore, Singapore 119260, Singapore
[2] Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 117685, Singapore
[3] Technology Development Department, Chartered Semiconductor Manufacturing, Singapore 738406, Singapore
[4] Silterra, Kulim 09000, Malaysia
[5] Agency for Science, Technology and Research (A*STAR), Singapore 117685, Singapore
Source

I.E.E.E. transactions on electron devices. 2008, Vol 55, Num 11, pp 3048-3055, 8 p ; ref : 24 ref

CODEN
IETDAI
ISSN
0018-9383
Scientific domain
Electronics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
Germanium stressors silicon-germanium stressors strained silicon nanowires
Keyword (fr)
Couche ultramince Nanofil Transistor effet champ
Keyword (en)
Ultrathin films Nanowires Field effect transistor
Keyword (es)
Transistor efecto campo
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F04 Transistors

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20859772

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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