Real-time Monitoring of Thin -Films' Optical Thickness at Shut-turning point with Fuzzy Logic
- Author
- ZHANG, Huilin1 2 ; JIAN, Xianzhong1 ; ZHOU, Bin2
[1] Computer andE. E. College, Univ. of Shanghai for Sci. and Tech, shanghai, 200093, China
[2] Pohl Institute of Solid State Physics, Tongji University, shanghai, 200092, China - Conference title
- Optical test and measurement technology and equipment (3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies)
- Conference name
- International Symposium on Advanced Optical Manufacturing and Testing Technologies (3 ; Chengdu 2007)
- Author (monograph)
- Pan, Junhua (Editor); Wyant, James C (Editor); Wang, Hexin (Editor)
Zhongguo guang xue xue hui, China (Organiser of meeting)
Guo jia zi ran ke xue ji jin wei yuan hui, China (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Zhongguo ke xue yuan, Institute of Optics and Electronics, China (Organiser of meeting)
State Key Laboratory of Optical Technology for Microfabrication, China (Organiser of meeting)
Sichuan Optical Society, China (Organiser of meeting)
Zhongguo guang xue xue hui, Committee of Optical Manufacturing Technology, China (Organiser of meeting)
Guo jia ke xue ji shu bu, China (Organiser of meeting)
Zhongguo ke xue yuan, China (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007, Vol 6723, pp 67233V.1-67233V.6 ; 3 ; ref : 6 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6880-2 0-8194-6880-0
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Couche mince Epaisseur couche Epaisseur optique Fabrication industrielle Filtre optique Logique floue Méthode mesure Méthode optique Système temps réel 0130C 0760 4279C 4287
- Keyword (en)
- Thin films Layer thickness Optical thickness Manufacturing Optical filters Fuzzy logic Measuring methods Optical method Real time systems
- Keyword (es)
- Espesor capa Espesor óptico Método óptico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79C Filters, zone plates, and polarizers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B87 Optical testing techniques
- Discipline
- Metrology Physics : optics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20931416
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.783566 
https://dx.doi.org/10.1117/12.783566
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