Molecular dynamics simulations of ion bombardment processes
- Author
- MARQUES, L. A1 ; JARAIZ, M1 ; RUBIO, J. E1 ; VICENTE, J1 ; BAILON, L. A1 ; BARBOLLA, J1
[1] Departamento de Electricidad y Electrónica, Facultad de Ciencias, Universidad de Valladolid, Spain - Conference title
- International Conference on Materials for Microelectronics
- Conference name
- International Conference on Materials for Microelectronics (1 ; Barcelona 1994-10-17)
- Author (monograph)
- Institute of Materials, London SW1Y 5DB, United Kingdom (Funder/Sponsor)
- Source
Materials science and technology. 1997, Vol 13, Num 11, pp 893-896 ; ref : 31 ref
- CODEN
- MSCTEP
- ISSN
- 0267-0836
- Scientific domain
- Crystallography; Chemical industry parachemical industry; Mechanics acoustics; Metallurgy, welding; Condensed state physics
- Publisher
- Maney, Leeds
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Calcul dynamique moléculaire Cristal Distribution énergie Effet physique rayonnement Effet température Emission particule Etat amorphe Etude expérimentale Faisceau ion Fluence Matériau semiconducteur Pulvérisation irradiation Rendement Silicium Simulation ordinateur Si
- Keyword (en)
- Molecular dynamics calculations Crystals Energy distribution Physical radiation effects Temperature effects Particle emission Amorphous state Experimental study Ion beams Fluence Semiconductor materials Sputtering Yields Silicon Computerized simulation
- Keyword (es)
- Distribución energía Emisión partícula Fluencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70I Electron and ion emission by liquids and solids; impact phenomena / 001B70I20 Impact phenomena (including electron spectra and sputtering) / 001B70I20R Atomic, molecular, and ion beam impact and interactions with surfaces
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2094881
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1179/mst.1997.13.11.893 
https://dx.doi.org/10.1179/mst.1997.13.11.893
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