The challenges of transitioning from linear to high-order overlay control in advanced lithography
- Author
- ADEL, M1 ; IZIKSON, P1 ; TIEN, D2 ; HUANG, C. K2 ; ROBINSON, J. C2 ; EICHELBERGER, B2
[1] KLA-Tencor Corp.(Israel), Haticshoret St., P.O Box 143, MigdalHaemek 23100, Israel
[2] KLA-Tencor Corp., One Technology Drive, Milpitas, CA, 95035, United States - Conference title
- Quantum optics, optical data storage, and advanced microlithography (12-14 November 2007, Beijing, China)
- Conference name
- Quantim optics, optical data storage, and advanced microlithography (Beijing 2007)
- Author (monograph)
- Guo, Guang-can (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Zhongguo guang xue xue hui, China (Organiser of meeting)
Nihon Kōgakkai, Ōyō Butsuri Gakkai, Japan (Organiser of meeting)
Zhongguo ke xue ji shu xie hui, China (Organiser of meeting)
Guo jia zi ran ke xue ji jin wei yuan hui, China (Organiser of meeting)
China, Guo jia ke xue ji shu bu, China (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 6827 ; 1Vol, pp 682722.1-682722.10 ; ref : 8 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7002-7 0-8194-7002-3
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Echantillonnage Etude théorique Fabrication industrielle Lithographie Méthode optimisation Méthode polynomiale 0130C 4282C Microlithographie
- Keyword (en)
- Sampling Theoretical study Manufacturing Lithography Optimization method Polynomial method Microlithography
- Keyword (es)
- Muestreo Método optimización Método polinomial
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20958992
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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