Influences of silicon nano-crystallized structures on the optical performance of silicon oxynitride rib-type waveguides
- Author
- LIU, Wen-Jen1 ; LAI, Yin-Chieh2 ; WENG, Min-Hang3
[1] Department of Material Science and Engineering, I-Shou University, Kaohsiung, Taiwan, Province of China
[2] Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan, Province of China
[3] National Nano Device Laboratories, Hsin-Shi, Tainan County, Taiwan, Province of China - Conference title
- Proceedings of the 35th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, California, April 28-May 2, 2008
- Conference name
- International Conference on Metallurgical Coatings and Thin Films (ICMCTF) (ICMCTF) (35 ; San Diego, California 2008-04-28)
- Author (monograph)
- PAULEAU, Yves (Editor); MAYRHOFER, Paul (Editor); ERDEMIR, Ali (Editor); INSPEKTOR, Aharon (Editor); RAMANATH, Ganapathiraman (Editor)
- Source
Thin solid films. 2008, Vol 517, Num 3, pp 1086-1090, 5 p ; ref : 11 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Optical communication Optical properties PECVD Silicon oxynitride Waveguide
- Keyword (fr)
- Ammoniac Couche mince Dépendance température Guide onde optique Guide onde Indice réfraction Interface Liaison matériau Microstructure Méthode PECVD Propriété optique Précurseur Recuit thermique Silane Silicium Oxynitrure Silicium 6855J 7866 8115G NH3 Si Substrat silicium
- Keyword (en)
- Ammonia Thin films Temperature dependence Optical waveguides Waveguides Refractive index Interfaces Bonding Microstructure PECVD Optical properties Precursor Thermal annealing Silanes Silicon Oxynitrides Silicon
- Keyword (es)
- Recocido térmico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21034286
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2008.06.021 
https://dx.doi.org/10.1016/j.tsf.2008.06.021
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