A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm
- Author
- FEIXIANG KE1 ; JIANMIN MIAO1 ; OBERHAMMER, Joachim2
[1] Micromachines Centre, School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore
[2] Microsystem lechnology Laboratory, School of Electrical Engineering, Royal Institute of Technology (KTH), 100 44 Stockholm, Sweden - Source
Journal of microelectromechanical systems. 2008, Vol 17, Num 6, pp 1447-1459, 13 p ; ref : 55 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- ' wafer-level packaging Contact metal RF microelectromechanical system (MEMS) switch contact resistance corrugated membrane
- Keyword (fr)
- Circuit hyperfréquence Diaphragme Dispositif microélectromécanique Etude expérimentale Ligne transmission Membrane Métal Nanotechnologie Nitrure de silicium Oxyde de silicium Oxynitrure Processus conception Rainure Surface cannelée
- Keyword (en)
- Microwave circuit Diaphragm Microelectromechanical device Experimental study Transmission line Membrane Metal Nanotechnology Silicon nitride Silicon oxides Nitrides oxides Design process Groove Corrugated surface
- Keyword (es)
- Circuito hiperfrecuencia Diafragma Dispositivo microelectromecánico Estudio experimental Línea transmisión Membrana Metal Nanotecnología Silicio nitruro Oxinitruro Proceso concepcion Ranura Superficie acanalada
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02B Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21107488
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2008.2004786 
https://dx.doi.org/10.1109/JMEMS.2008.2004786
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