Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry
- Author
- SCHUSTER, Thomas1 ; RAFLER, Stephan1 ; PREMIER, Karsten1 ; OSTEN, Wolfgang1
[1] Institut fuer Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany - Conference title
- Ninth International Symposium on Laser Metrology (30 June - 2 July 2008, Singapore)
- Conference name
- International Symposium on Laser Metrology (9 ; Singapore 2008)
- Author (monograph)
- Quan, Chenggen (Editor); Asundi, Anand (Editor)
Nanyang Technological University, School of Mechanical and Aerospace Engineering (Organiser of meeting)
National University of Singapore, Dept. of Mechanical Engineering, Singapore (Organiser of meeting)
Singapore, Agency for Science, Technology and Research, Singapore (Organiser of meeting)
Singapore Institue of Manufacturing Technology, Singapore (Organiser of meeting)
SPIE, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7155, pp 71550W.1-71550W.12 ; 2 ; ref : 38 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7398-1 0-8194-7398-7
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Application laser Cadmium Sulfure Composé binaire Ellipsométrie spectroscopique Etude théorique Incidence normale Lithographie Modèle milieu effectif Méthode mesure Méthode optique Rugosité Réflectométrie Semiconducteur II-VI 0130C 4262E Cd S CdS Métrologie optique
- Keyword (en)
- Laser beam applications Cadmium Sulfides Binary compounds Spectroscopic ellipsometry Theoretical study Normal incidence Lithography Effective medium model Measuring methods Optical method Roughness Reflectometry II-VI semiconductors Optical metrology
- Keyword (es)
- Elipsometría espectroscópica Incidencia normal Modelo medio efectivo Método óptico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B62 Biological and medical applications / 001B40B62E Metrological applications
- Discipline
- Physics : optics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21132117
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.814532 
https://dx.doi.org/10.1117/12.814532
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