Polysilicon MEMS accelerometers exposed to shocks : numerical-experimental investigation
- Author
- GHISI, Aldo1 ; KALICINSKI, Stanislaw2 3 ; MARIANI, Stefano1 ; DE WOLF, Ingrid2 3 ; CORIGLIANO, Alberto1
[1] Dipartimento di Ingegneria Strutturale, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy
[2] IMEC, Kapeldreef 75, 3001 Leuven, Belgium
[3] Department MTM, K U Leuven, Kasteelpark Arenberg 44, 3001 Leuven, Belgium - Source
Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 3 ; 035023.1-035023.12 ; ref : 18 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Accéléromètre Capteur accélération Capteur mesure Dispositif microélectromécanique Effet non linéaire Etude expérimentale Gravité Modèle dynamique Modélisation Réponse transitoire Silicium polycristallin Système 2 degrés liberté
- Keyword (en)
- Accelerometers Acceleration sensor Measurement sensor Microelectromechanical device Non linear effect Experimental study Gravity Dynamic model Modelling Transient response Polysilicon System with two degrees of freedom
- Keyword (es)
- Sensor acceleración Captador medida Dispositivo microelectromecánico Efecto no lineal Modelo dinámico Silicio policristal Sistema 2 grados libertad
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21207101
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/19/3/035023 
https://dx.doi.org/10.1088/0960-1317/19/3/035023
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