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3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems : These technologies stack and interconnect materials and components to achieve high density, small size, low weight, reduced power, and very low cost

Author
LU, Jian-Qiang1
[1] Department of Electrical, Computer, and Systems Engineering and Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy, NY 12180, United States
Issue title
3-D Integration Technologies
Author (monograph)
CAMPARDO, G (Editor); RIPAMONTI, G (Editor); MICHELONI, R (Editor)
[1] Card Business Unit, Numonyx NAND Flash Group, International
Source

Proceedings of the IEEE. 2009, Vol 97, Num 1, pp 18-30, 13 p ; ref : 93 ref

CODEN
IEEPAD
ISSN
0018-9219
Scientific domain
Computer science
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
3-D packaging Hyperintegration InfoTech-NanoTech-BioTech systems three-dimensional (3-D) integration through silicon via wafer alignment wafer bonding
Keyword (fr)
Appareil portatif Article synthèse Circuit intégré Conception assistée Conception circuit Densité élevée Diminution coût Dispositif à mémoire Electronique faible puissance Fabrication microélectronique Fixation pastille Haute performance Interconnexion Micromachine Modèle 3 dimensions Multifonctionnalité Nanotechnologie Packaging électronique Pastille électronique Prototype Structure 3 dimensions Système intégré
Keyword (en)
Portable equipment Review Integrated circuit Computer aided design Circuit design High density Cost lowering Memory devices Low-power electronics Microelectronic fabrication Wafer bonding High performance Interconnection Micromachine Three dimensional model Multifunctionality Nanotechnology Electronic packaging Wafer Prototype Three dimensional structure Integrated system
Keyword (es)
Aparato portátil Artículo síntesis Circuito integrado Concepción asistida Diseño circuito Densidad elevada Reducción costes Fabricación microeléctrica Fijación pastilla Alto rendimiento Interconexión Micromáquina Modelo 3 dimensiones Multifuncionalidad Nanotecnología Packaging electrónico Pastilla electrónica Prototipo Estructura 3 dimensiones Sistema integrado
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03I Storage and reproduction of information / 001D03I02 Magnetic and optical mass memories

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
21244860

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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