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The effect of the III/V ratio and substrate temperature on the morphology and properties of GaN- and AlN-layers grown by molecular beam epitaxy on Si(1 1 1)

Author
SANCHEZ-GARCIA, M. A1 ; CALLEJA, E1 ; MONROY, E1 ; SANCHEZ, F. J1 ; CALLE, F1 ; MUNOZ, E1 ; BERESFORD, R1
[1] Departmento Ingenieria Electrónica, ETSI Telecomunicación, UPM Ciudad Universitaria s/n, 28040 Madrid, Spain
Source

Journal of crystal growth. 1998, Vol 183, Num 1-2, pp 23-30 ; ref : 22 ref

CODEN
JCRGAE
ISSN
0022-0248
Scientific domain
Crystallography; Geology; Metallurgy, welding
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Keyword (fr)
Aluminium nitrure Cinétique Composition chimique Composé binaire Couche épitaxique Croissance cristalline en phase vapeur Dépendance température Epitaxie jet moléculaire Etude expérimentale Gallium nitrure Hétéroépitaxie Morphologie Photoluminescence Propriété optique SEM Substrat Al N AlN Ga N GaN Substrat Si Composé minéral
Keyword (en)
Aluminium nitrides Kinetics Chemical composition Binary compounds Epitaxial layers Crystal growth from vapors Temperature dependence Molecular beam epitaxy Experimental study Gallium nitrides Heteroepitaxy Morphology Photoluminescence Optical properties SEM Substrates Inorganic compounds
Keyword (es)
Heteroepitaxia
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15H Molecular, atomic, ion, and chemical beam epitaxy

Pacs
8115H Molecular, atomic, ion, and chemical beam epitaxy

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
2129601

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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