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The Structural and Optical Properties of High-Al-Content AIInGaN Epilayers grown by RF-MBE

Author
WANG BAOZHU1 2 ; AN TAO; WEN HUANMING1 ; WU RUIHONG1 ; AN SHENGBIAO1 ; ZHANG XIUQING1 ; WANG XIAOLIANG2
[1] Institute of Information Science and Engineering, Hebei University of Science and Technology, Shijiazhuang 050000, China
[2] Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Conference title
Optoelectronic materials and devices III (27-30 October 2008, Hangzhou, China)
Conference name
Optoelectronic materials and devices (3 ; Hangzhou 2008)
Author (monograph)
Luo, Yi (Editor)
Zhejiang Optical Society (Organiser of meeting)
Hangzhou Shi, China (Organiser of meeting)
Fuyang Shi, China (Organiser of meeting)
SPIE, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7135 ; 71350U.1-71350U.8 ; 2 ; ref : 25 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-7375-2 0-8194-7375-8
Scientific domain
Electronics; Optics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Alliage quaternaire Caractéristique optique Cathodoluminescence Diffraction RX Diffusion Rutherford Epitaxie jet moléculaire Fabrication microélectronique Fissure Plasma Propriété optique RBS RHEED Radiofréquence Rayon X Rétrodiffusion Rutherford 0130C Substrat saphir
Keyword (en)
Quaternary alloys Optical characteristic Cathodoluminescence X ray diffraction Rutherford scattering Molecular beam epitaxy Microelectronic fabrication Crack Plasma Optical properties RBS RHEED Radiofrequency X ray Rutherford backscattering
Keyword (es)
Característica óptica Catodoluminiscencia Difracción RX Difusión Rutherford Fabricación microeléctrica Fisura Plasma Propiedad óptica Radiofrecuencia Rayos X Retrodifusión Rutherford
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Discipline
Electronics Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
21298551

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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