Surface characterization of titanium oxide films synthesized by ion beam enhanced deposition
- Author
- ZHANG, F1 ; JIN, S2 ; MAO, Y1 ; ZHENG, Z1 ; CHEN, Y1 ; LIU, X1
[1] Ion Beam Lab, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, China
[2] IMEC, Kapeldreef 75, 3001 Leuven, Belgium - Source
Thin solid films. 1997, Vol 310, Num 1-2, pp 29-33 ; ref : 6 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Biomatériau Composition chimique Composé binaire Croissance cristalline en phase vapeur Déplacement chimique Effet physique rayonnement Etat chimique Etude expérimentale Faisceau ionique Faisceau électronique Film Rayon X Spectrométrie photoélectron Surface Titane oxyde O Ti TiO Composé minéral Métal transition composé
- Keyword (en)
- Biomaterial Chemical composition Binary compounds Crystal growth from vapors Chemical shift Physical radiation effects Chemical states Experimental study Ion beam Electron beam Films X radiation Photoelectron spectroscopy Surfaces Titanium oxides Inorganic compounds Transition element compounds
- Keyword (es)
- Biomaterial Haz iónico Haz electrónico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55N Composition and phase identification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15J Ion and electron beam-assisted deposition; ion plating
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2132794
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0040-6090(97)00338-6 
https://dx.doi.org/10.1016/S0040-6090(97)00338-6
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