Polarized angular dependence of out-of-plane light-scattering measurements for nanoparticles on wafer
- Author
- LIU, Cheng-Yang1 ; FU, Wei-En1
[1] Center for Measurement Standards, Industrial Technology Research Institute, 321 Kuang Fu Road Sec. 2, Hsinchu 300, Taiwan, Province of China - Source
Optics communications. 2009, Vol 282, Num 11, pp 2097-2103, 7 p ; ref : 30 ref
- CODEN
- OPCOB8
- ISSN
- 0030-4018
- Scientific domain
- Electronics; Optics; Telecommunications
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- 42.62.Cf 42.68.Mj 68.49.-h Bidirectional ellipsometry Light-scattering measurement Nanoparticles
- Keyword (fr)
- Contamination superficielle Diffusion lumière Ellipsométrie Méthode mesure Méthode optique Nanoparticule Polarisation optique Silicium 0760F 4225F
- Keyword (en)
- Surface contamination Light scattering Ellipsometry Measuring methods Optical method Nanoparticles Optical polarization Silicon
- Keyword (es)
- Método óptico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60F Polarimeters and ellipsometers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B25 Wave optics / 001B40B25F Diffraction and scattering
- Discipline
- Metrology Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21378766
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.optcom.2009.02.021 
https://dx.doi.org/10.1016/j.optcom.2009.02.021
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