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Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges

Author
JALALI, M1 ; MAILLARD, P1 2 ; WÜTHRICH, R1
[1] Department of Mechanical and Industrial Engineering, Concordia University, Montreal, Quebec H3G 1M8, Canada
[2] École Polytechnique Fédérale de Lausanne, Laboratoire de systèmes robotiques, Station 9, 1015 Lausanne, Switzerland
Source

Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 4 ; 045001.1-045001.7 ; ref : 21 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Attaque chimique Chauffage Conduction électrique Erosion Etude expérimentale Forage Microgravité Microusinage Modélisation Propriété électrochimique Source chaleur Usinage électrochimique Verre
Keyword (en)
Chemical etching Heating Electrical conduction Erosion Experimental study Drilling Microgravity Micromachining Modeling Electrochemical properties Heat source Electrochemical machining Glass
Keyword (es)
Ataque químico Calefacción Conductor eléctrico Erosión Estudio experimental Sondeo Microgravidez Micromaquinado Modelización Propiedad electroquímica Fuente calor Mecanizado electroquímico Vidrio
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
21386879

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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