Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma
- Author
- LALLEMENT, L1 ; RHALLABI, A1 ; CARDINAUD, C1 ; PEIGNON-FERNANDEZ, M. C1 ; ALVES, L. L2
[1] Institut des Matériaux, University of Nantes, CNRS, 2 rue de la Houssinière, BP32229, 44322 Nantes, France
[2] Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Av. Rovisco Pais, 1049-001 Lisboa, Portugal - Source
Plasma sources science & technology (Print). 2009, Vol 18, Num 2 ; 025001.1-025001.10 ; ref : 53 ref
- ISSN
- 0963-0252
- Scientific domain
- Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Argon Basse pression Bilan énergie Condition opératoire Densité électron Diagnostic plasma Etude expérimentale Hexafluorure de soufre Méthode optique Plasma couplé inductivement Sonde Langmuir Spectrométrie émission Température plasma Température électron 5270 5270D 5270K 5280Y
- Keyword (en)
- Argon Low pressure Energy balance Operating conditions Electron density Plasma diagnostics Experimental study Sulfur hexafluoride Optical method Inductively coupled plasma Langmuir probes Emission spectroscopy Plasma temperature Electron temperature
- Keyword (es)
- Condición operatoria Persulfurano(hexafluoro) Método óptico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B70 Plasma diagnostic techniques and instrumentation / 001B50B70D Electric and magnetic measurements
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B70 Plasma diagnostic techniques and instrumentation / 001B50B70K Optical (ultraviolet, visible, infrared) measurements
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges / 001B50B80Y Discharges for spectral sources (including inductively coupled plasmas)
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21431878
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0963-0252/18/2/025001 
https://dx.doi.org/10.1088/0963-0252/18/2/025001
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