Laser-induced fluorescence detection of SiF2 as a primary product of Si and SiO2 reactive ion etching with CF4 gas
- Author
- CUNGE, G1 ; CHABERT, P1 2 3 ; BOOTH, J.-P1
[1] Laboratoire de Spectrométrie Physique, Université J Fourier-Grenoble, BP 87, 38402 St Martin d'Hères, France
[2] Laboratoire PRIAM-ONERA, 91761 Palaiseau, France
[3] Thomson-CSF/LCR, Domaine de Corbeville, 91404 Orsay, France - Conference title
- Europhysics Sectional Conference on Atomic and Molecular Physics of Ionized Gases
- Conference name
- Europhysics Sectional Conference on Atomic and Molecular Physics of Ionized Gases (Poprad, High Tatras 1996-08-27)
- Source
Plasma sources science & technology (Print). 1997, Vol 6, Num 3, pp 349-360 ; ref : 43 ref
- ISSN
- 0963-0252
- Scientific domain
- Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Chimie plasma Détecteur fluorescence Etude expérimentale Gravure ionique réactive Hydrocarbure fluoré Laser UV Mélange gaz
- Keyword (en)
- Plasma chemistry Fluorescence detector Experimental study Reactive ion etching Fluorocarbon Ultraviolet laser Gas mixtures
- Keyword (es)
- Química plasma Detector fluorescencia Grabado iónico reactivo Hidrocarburo fluorado Laser UV
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B30 Atomic and molecular physics / 001B30B Atomic properties and interactions with photons / 001B30B50 Fluorescence, phosphorescence (including quenching)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B77 Plasma applications
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Discipline
- Atomic and molecular physics Physics and materials science Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2167582
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0963-0252/6/3/012 
https://dx.doi.org/10.1088/0963-0252/6/3/012
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