Inductively-coupled-plasma-assisted planar magnetron discharge for enhanced ionization of sputtered atoms
- Author
- SETSUHARA, Y1 ; KAMAI, M1 ; MIYAKE, S1 ; MUSIL, J2
[1] Joining and Welding Research Institute, Osaka University 11-1 Mihogaoka, Ibaraki, Osaka, Japan
[2] Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 18040 Prague, Czech Republic - Conference title
- Plasma processing
- Conference name
- ICRP-3/SPP-14 (Nara 1997-01-21) = ICRP-3: International Conference on Reactive Plasmas (3 ; Nara 1997-01-21)
- Author (monograph)
- KAWAI, Yoshinobu (Editor); MAKABE, Toshiaki (Editor); ONO, Kouichi (Editor); SAMUKAWA, Seiji (Editor); SUGAI, Hideo (Editor); TACHIBANA, Kunihide (Editor); TSUDA, Shinya (Editor); WATANABE, Yukio (Editor)
Japan Society of Applied Physics, Japan (Funder/Sponsor) - Source
Japanese journal of applied physics. 1997, Vol 36, Num 7B, pp 4568-4571 ; 1 ; ref : 13 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Etude expérimentale Ionisation Magnétron Onde hélicon Plasma couplé inductivement Pulvérisation irradiation Radiofréquence Résonance cyclotronique électronique Spectrométrie optique
- Keyword (en)
- Experimental study Ionization Magnetrons Helicon waves Inductively coupled plasma Sputtering Radiofrequency Electron cyclotron-resonance Optical spectrometry
- Keyword (es)
- Radiofrequencia Espectrometría óptica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B40 Plasma interactions (nonlaser) / 001B50B40D Electromagnetic (nonlaser) radiation interactions with plasma
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B50 Plasma production and heating / 001B50B50D Plasma sources
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges / 001B50B80Y Discharges for spectral sources (including inductively coupled plasmas)
- Pacs
- 5250D Plasma sources
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2167627
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.36.4568 
https://dx.doi.org/10.1143/JJAP.36.4568
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