Poly-Silicon Based Latching RF MEMS Switch
- Author
- NORDQUIST, Christopher D1 ; BAKER, Michael S1 ; KRAUS, Garth M1 ; CZAPLEWSKI, David A1 ; PATRIZI, Gary A1
[1] Sandia National Laboratories, Albuquerque, NM 87123, United States - Source
IEEE microwave and wireless components letters. 2009, Vol 19, Num 6, pp 380-382, 3 p ; ref : 10 ref
- ISSN
- 1531-1309
- Scientific domain
- Electronics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Contacts microelectromechanical devices silicon switches
- Keyword (fr)
- Accès multiple Commutateur Commutation Dispositif microélectromécanique Electronique faible puissance Fabrication microélectronique Microusinage Perte de retour Perte insertion Polycristal Structure flexible
- Keyword (en)
- Multiple access Selector switch Switching Microelectromechanical device Low-power electronics Microelectronic fabrication Micromachining Return loss Insertion loss Polycrystal Flexible structure
- Keyword (es)
- Acceso múltiple Conmutador Conmutación Dispositivo microelectromecánico Fabricación microeléctrica Micromaquinado Pérdida de retorno Pérdida inserción Policristal Estructura flexible
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02A Electronic circuits / 001D03G02A7 Switching, multiplexing, switched capacity circuits
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21794611
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/LMWC.2009.2020025 
https://dx.doi.org/10.1109/LMWC.2009.2020025
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