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Poly-Silicon Based Latching RF MEMS Switch

Author
NORDQUIST, Christopher D1 ; BAKER, Michael S1 ; KRAUS, Garth M1 ; CZAPLEWSKI, David A1 ; PATRIZI, Gary A1
[1] Sandia National Laboratories, Albuquerque, NM 87123, United States
Source

IEEE microwave and wireless components letters. 2009, Vol 19, Num 6, pp 380-382, 3 p ; ref : 10 ref

ISSN
1531-1309
Scientific domain
Electronics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
Contacts microelectromechanical devices silicon switches
Keyword (fr)
Accès multiple Commutateur Commutation Dispositif microélectromécanique Electronique faible puissance Fabrication microélectronique Microusinage Perte de retour Perte insertion Polycristal Structure flexible
Keyword (en)
Multiple access Selector switch Switching Microelectromechanical device Low-power electronics Microelectronic fabrication Micromachining Return loss Insertion loss Polycrystal Flexible structure
Keyword (es)
Acceso múltiple Conmutador Conmutación Dispositivo microelectromecánico Fabricación microeléctrica Micromaquinado Pérdida de retorno Pérdida inserción Policristal Estructura flexible
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02A Electronic circuits / 001D03G02A7 Switching, multiplexing, switched capacity circuits

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
21794611

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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