Modelling strategies for the incorporation and correction of optical effects in EUVL
- Author
- PATHAK, Piyush1 ; QILIANG YAN1 ; SCHMOELLER, Thomas2 ; CROFFIE, Ebo1 ; ISOYAN, Artak1 ; MELVIN, Lawrence S1
[1] Synopsys, Inc. 2025 NW Cornelius Pass Road, Hillsboro, OR 97124, United States
[2] Synopsys, Inc. GmbH, Karl-Hammerschmidt-Str 34, 85609 Aschheim/Dornach, Germany - Conference title
- MNE'08. The 34th International Conference on Micro- and Nano-Engineering (MNE)
- Conference name
- International Conference on Micro- and Nano-Engineering (MNE) (MNE) (34 ; Athens 2008-09-15)
- Author (monograph)
- RAPTIS, Ioannis (Editor)1 ; GOGOLIDES, Evangelos (Editor)1
[1] Institute of Microelectronics, NCSR 'Demokritos', Greece - Source
Microelectronic engineering. 2009, Vol 86, Num 4-6, pp 500-504, 5 p ; ref : 14 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- EUV Flare Image formation OPC Optics Shadowing
- Keyword (fr)
- Caractéristique optique Correction optique de proximité Diffraction optique Fabrication microélectronique Fonction transfert optique Formation image Lithographie UV Modélisation Photolithographie Rayonnement UV extrême
- Keyword (en)
- Optical characteristic Optical proximity correction Optical diffraction Microelectronic fabrication Optical transfer function Imaging UV lithography Modeling Photolithography Vacuum ultraviolet radiation
- Keyword (es)
- Característica óptica Corrección de proximidad óptica Difracción óptica Fabricación microeléctrica Función transferencia óptica Formación imagen Litografía UV Modelización Fotolitografía Radiación ultravioleta extrema
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21799582
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2008.12.015 
https://dx.doi.org/10.1016/j.mee.2008.12.015
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