Moulding of arrowhead structures
- Author
- MÖLLENBECK, S1 ; BOGDANSKI, N1 ; SCHEER, H.-C1 ; ZAJADACZ, J2 ; ZIMMER, K2
[1] Microstructure Engineering, University of Wuppertal, Rainer-Gruenter Str. 21, 42119 Wuppertal, Germany
[2] Leibniz Institute for Surface Modification, Permoserstrasse 15, 04318 Leipzig, Germany - Conference title
- MNE'08. The 34th International Conference on Micro- and Nano-Engineering (MNE)
- Conference name
- International Conference on Micro- and Nano-Engineering (MNE) (MNE) (34 ; Athens 2008-09-15)
- Author (monograph)
- RAPTIS, Ioannis (Editor)1 ; GOGOLIDES, Evangelos (Editor)1
[1] Institute of Microelectronics, NCSR 'Demokritos', Greece - Source
Microelectronic engineering. 2009, Vol 86, Num 4-6, pp 608-610, 3 p ; ref : 8 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- 3D-structures Moulding PDMS Undercuts
- Keyword (fr)
- Propriété matériau Réplication
- Keyword (en)
- Properties of materials Replication
- Keyword (es)
- Propiedad material Replicación
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21799608
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2008.12.035 
https://dx.doi.org/10.1016/j.mee.2008.12.035
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