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Moulding of arrowhead structures

Author
MÖLLENBECK, S1 ; BOGDANSKI, N1 ; SCHEER, H.-C1 ; ZAJADACZ, J2 ; ZIMMER, K2
[1] Microstructure Engineering, University of Wuppertal, Rainer-Gruenter Str. 21, 42119 Wuppertal, Germany
[2] Leibniz Institute for Surface Modification, Permoserstrasse 15, 04318 Leipzig, Germany
Conference title
MNE'08. The 34th International Conference on Micro- and Nano-Engineering (MNE)
Conference name
International Conference on Micro- and Nano-Engineering (MNE) (MNE) (34 ; Athens 2008-09-15)
Author (monograph)
RAPTIS, Ioannis (Editor)1 ; GOGOLIDES, Evangelos (Editor)1
[1] Institute of Microelectronics, NCSR 'Demokritos', Greece
Source

Microelectronic engineering. 2009, Vol 86, Num 4-6, pp 608-610, 3 p ; ref : 8 ref

CODEN
MIENEF
ISSN
0167-9317
Scientific domain
Electronics
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Author keyword
3D-structures Moulding PDMS Undercuts
Keyword (fr)
Propriété matériau Réplication
Keyword (en)
Properties of materials Replication
Keyword (es)
Propiedad material Replicación
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
21799608

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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