Sensitivity improvement of a microcantilever based mass sensor
- Author
- NARDUCCI, Margarita1 ; FIGUERAS, Eduard1 ; LOPEZ, Maria José1 ; GRACIA, Isabel1 ; SANTANDER, Joaquin1 ; IVANOV, Peter1 ; FONSECA, Luis1 ; CANE, Carles1
[1] Instituto de Microelectrónica de Barcelona, IMB-CNM (CSIC), Barcelona 08290, Spain - Conference title
- MNE'08. The 34th International Conference on Micro- and Nano-Engineering (MNE)
- Conference name
- International Conference on Micro- and Nano-Engineering (MNE) (MNE) (34 ; Athens 2008-09-15)
- Author (monograph)
- RAPTIS, Ioannis (Editor)1 ; GOGOLIDES, Evangelos (Editor)1
[1] Institute of Microelectronics, NCSR 'Demokritos', Greece - Source
Microelectronic engineering. 2009, Vol 86, Num 4-6, pp 1187-1189, 3 p ; ref : 9 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Cantilever Piezoactuator Piezoresistor Resonance frequency
- Keyword (fr)
- Actionneur piézoélectrique Capteur mesure Dispositif piézorésistif Fabrication microélectronique Facteur qualité Forme en T Fréquence fondamentale Fréquence résonance Microusinage Pont Wheatstone Poutre cantilever Résonateur 0707D
- Keyword (en)
- Piezoelectric actuators Measurement sensor Piezoresistive device Microelectronic fabrication Q factor T shape Fundamental frequency Resonance frequency Micromachining Wheatstone bridge Cantilever beam Resonator
- Keyword (es)
- Captador medida Dispositivo piezoresistivo Fabricación microeléctrica Factor calidad Forma de una T Frecuencia fundamental Frecuencia resonancia Micromaquinado Puente Wheatstone Viga cantilever Resonador
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D02 Computer science; control theory; systems / 001D02D Control theory. Systems / 001D02D11 Robotics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F14 Acoustic wave devices, piezoelectric and piezoresistive devices
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02A Electronic circuits / 001D03G02A1 Oscillators, resonators, synthetizers
- Discipline
- Computer science : theoretical automation and systems Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21799761
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2009.01.022 
https://dx.doi.org/10.1016/j.mee.2009.01.022
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