Molecular resists based on calix[4]resorcinarene derivatives for EB lithography
- Author
- OKUYAMA, Kenichi1
[1] Nano Science Research Center, Dai Nippon Printing Co., Ltd., 1-3, Midorigahara 1-chome, Tsukuba-shi, Ibaraki 300-2646, Japan - Conference title
- Advances in resist materials and processing technology XXVI (23-25 February 2009, San Jose, California, United States)
- Conference name
- Advances in resist materials and processing technology (26 ; San Jose CA 2009)
- Author (monograph)
- Henderson, Clifford L (Editor)
SPIE, United States (Organiser of meeting)
International SEMATECH (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7273 ; 7273U.1-72732U.7 ; 2 ; ref : 13 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7526-8 0-8194-7526-2
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Calixarène Faisceau électron Faisceau électronique Lithographie faisceau électron Lithographie Optimisation Rugosité Résist amplification chimique Révélateur 0130C 4282C 8540H
- Keyword (en)
- Calixarene Electron beams Electron beam Electron beam lithography Lithography Optimization Roughness Chemically amplified resist Developers
- Keyword (es)
- Calixareno Haz electrónico Resistencia amplificación química
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21920503
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.813632 
https://dx.doi.org/10.1117/12.813632
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