Innovative surface wave plasma reactor technique for PFC abatement
- Author
- HARTZ, C. L1 ; BEVAN, J. W1 ; JACKSON, M. W2 ; WOFFORD, B. A2
[1] Department of Chemistry, Texas A&M University, College Station, Texas 77843-3255, United States
[2] Rf Environmental Systems, Inc., 1506 Loch Lake Drive, Seabrook, Texas 77586, United States - Source
Environmental science & technology. 1998, Vol 32, Num 5, pp 682-687 ; ref : 14 ref
- CODEN
- ESTHAG
- ISSN
- 0013-936X
- Scientific domain
- Biotechnology; Ecology; Energy; Environment; Pollution
- Publisher
- American Chemical Society, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Décomposition chimique Effet serre Emission polluant Fabrication microélectronique Fluor Composé organique Gaz naturel Hydrocarbure fluoré Industrie électronique Modification climat Onde surface Oxygène Performance Pollution air Prévention pollution Réacteur plasma Réchauffement Semiconducteur Ethane(hexafluoro)
- Keyword (en)
- Chemical decomposition Greenhouse effect Pollutant emission Microelectronic fabrication Fluorine Organic compounds Natural gas Fluorocarbon Electronics industry Climate modification Surface wave Oxygen Performance Air pollution Pollution prevention Plasma reactor Warming Semiconductor materials
- Keyword (es)
- Descomposición química Efecto invernadero Emisión contaminante Fabricación microeléctrica Fluor Compuesto orgánico Gas natural Hidrocarburo fluorado Industria electrónica Modificación clima Onda superficie Oxígeno Rendimiento Contaminación aire Prevención polución Reactor plasma Calefacción Semiconductor(material)
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D16 Pollution / 001D16C Atmospheric pollution / 001D16C05 Prevention and purification methods / 001D16C05C Other pollution sources in industry
- Discipline
- Pollution
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2192054
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1021/es9706514 
https://dx.doi.org/10.1021/es9706514
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