Applications of Pulsed Discharge to Thin-Film Deposition
- Author
- OPALINSKA, Teresa1 ; ULEJCZYK, Bogdan2 ; SCHMIDT-SZALOWSKI, Krzysztof3
[1] Tele and Radio Research Institute, 00-241 Warsaw, Poland
[2] Institute of Plasma Physics and Laser Microfusion, 01-497 Warsaw, Poland
[3] Faculty of Chemistry, Warsaw University of Technology, 00-664 Warsaw, Poland - Issue title
- Special Issue on Atmospheric-Pressure Plasmas: Science and Applications
- Author (monograph)
- BECKER, Kurth H (Editor)1
[1] Polytechnic Institute of NYU, Brooklyn, NY 11201, United States - Source
IEEE transactions on plasma science. 2009, Vol 37, Num 6, pp 934-940, 7 p ; 1 ; ref : 19 ref
- CODEN
- ITPSBD
- ISSN
- 0093-3813
- Scientific domain
- Nuclear physics; Plasma physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Dielectric breakdown plasma CVD thin films
- Keyword (fr)
- Carbone Couche mince Décharge barrière diélectrique Décharge capacitive Décharge impulsionnelle Grande puissance Méthode PECVD Oxygène Réacteur plasma Silicium Spectre photoélectron RX 5270L 5277D 5280T
- Keyword (en)
- Carbon Thin films Dielectric barrier discharge Capacitive discharge Pulsed discharge High power PECVD Oxygen Plasma reactor Silicon X-ray photoelectron spectra
- Keyword (es)
- Descarga capacitiva Descarga impulsional Gran potencia Reactor plasma
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B70 Plasma diagnostic techniques and instrumentation / 001B50B70L X-ray and γ-ray measurements
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B77 Plasma applications / 001B50B77D Plasma-based ion implantation and deposition
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges / 001B50B80T Other gas discharges
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21934344
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/TPS.2009.2019094 
https://dx.doi.org/10.1109/TPS.2009.2019094
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