Study of optical properties and molecular structure of plasma polymerized diethylene glycol dimethyl ether
- Author
- ALGATTI, M. A1 ; MOTA, R. P1 ; HONDA, R. Y1 ; KAYAMA, M. E1 ; KOSTOV, K. G1 ; FERNANDES, R. S1 ; AZEVEDO, T. C. A. M1 ; CRUZ, N. C2
[1] Universidade Estadual Paulista, Campus de Guaratinguetá, Faculdade de Engenharia, Departamento de Física e Química, Av. Ariberto Pereira da Cunha 333, Pedregulho, 12516-410 Guaratinguetá, SP, Brazil
[2] Universidade Estadual Paulista, Campus de Sorocaba, Av. Três de Março 511, 18087-180 Sorocaba, SP, Brazil - Issue title
- Carbon-free SiOx films deposited from octamethylcyclotetrasiloxane
- Author (monograph)
- SCHÄFER, J1 ; FOEST, R1 ; QUADE, A1 ; OHL, A1 ; MEICHSNER, J2 ; WELTMANN, K. D1
[1] INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
[2] Ernst-Moritz-Arndt University Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany - Source
The European physical journal. D, Atomic, molecular and optical physics (Print). 2009, Vol 54, Num 2, pp 325-328, 4 p ; ref : 24 ref
- ISSN
- 1434-6060
- Scientific domain
- Optics; Atomic molecular physics
- Publisher
- EDP Sciences, Les Ulis
- Publication country
- France
- Document type
- Article
- Language
- English
- Keyword (fr)
- Coefficient absorption Indice réfraction Physique plasma Propriété diélectrique plasma Propriété optique Revêtement Silicium Spectrométrie visible Transformation Fourier Verre 5225 5225M
- Keyword (en)
- Absorption coefficients Refractive index Plasma physics Plasma dielectric properties Optical properties Coatings Silicon Visible spectroscopy Fourier transformation Glass
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B25 Plasma properties / 001B50B25M Dielectric properties
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21934399
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1140/epjd/e2009-00043-7 
https://dx.doi.org/10.1140/epjd/e2009-00043-7
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