Vibration energy harvesting with aluminum nitride-based piezoelectric devices
- Author
- ELFRINK, R1 ; KAMEL, T. M1 ; GOEDBLOED, M1 ; MATOVA, S1 ; HOHLFELD, D1 ; VAN ANDEL, Y1 ; VAN SCHAIJK, R1
[1] IMEC/Holst Centre, Eindhoven, Netherlands - Source
Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 9 ; 094005.1-094005.8 ; ref : 15 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Dispositif piézoélectrique Encapsulation Etude expérimentale Fréquence résonance Haute tension Microusinage Nitrure d'aluminium Optimisation Piézoélectrique Procédé dépôt Puissance sortie Récupération énergie Transducteur piézoélectrique Vibration
- Keyword (en)
- Piezoelectric devices Encapsulation Experimental study Resonance frequency High voltage Micromachining Aluminium nitride Optimization Piezoelectric materials Deposition process Output power Energy recovery Piezoelectric transducers Vibrations
- Keyword (es)
- Frecuencia resonancia Alta tensión Aluminio nitruro Piezoeléctrica Procedimiento revestimiento Potencia salida
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07M Transducers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 21946589
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/19/9/094005 
https://dx.doi.org/10.1088/0960-1317/19/9/094005
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