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Effect of NH3 on the preparation of TiNx films by laser CVD using tetrakis-diethylamido-titanium

Author
YANSHENG GONG1 ; RONG TU1 ; GOTO, Takashi1
[1] Institute for Materials Research, Tohoku University, Aoba-ku, 2-1-1 Katahira, Sendai 980-8577, Japan
Source

Journal of alloys and compounds. 2009, Vol 485, Num 1-2, pp 451-455, 5 p ; ref : 23 ref

ISSN
0925-8388
Scientific domain
Inorganic chemistry; Crystallography; Metallurgy, welding; Condensed state physics
Publisher
Elsevier, Kidlington
Publication country
United Kingdom
Document type
Article
Language
English
Author keyword
LCVD Microstructure Preferred orientation TDEAT TiNx films
Keyword (fr)
Ammoniac Couche mince Dépôt chimique phase vapeur Dépôt laser Microstructure Nitrure de titane Orientation préférentielle Paramètre cristallin Photoluminescence Structure cristalline Texture Titane Vitesse dépôt 6166 7855 8115G NH3 Ti
Keyword (en)
Ammonia Thin films CVD Laser deposition Microstructure Titanium nitride Preferred orientation Lattice parameters Photoluminescence Crystal structure Texture Titanium Deposition rate
Keyword (es)
Titanio nitruro Orientación preferencial Velocidad deposición
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A66 Structure of specific crystalline solids

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H55 Photoluminescence

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
22060685

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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