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A new, high precision, quick response pressure regulator for active control of pneumatic vibration isolation tables

Author
KATO, Tomonori1 ; KAWASHIMA, Kenji2 ; FUNAKI, Tatsuya3 ; TADANO, Kotaro2 ; KAGAWA, Toshiharu2
[1] Tokyo Metropolitan College of Industrial Technology, 1-10-40 Higashi-oi, Shinagawa, Tokyo, Japan
[2] Tokyo Institute of Technology, 4259 R2-46 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8503, Japan
[3] National Metrology Institute of Japan, AIST, Tsukuba Central 3, Umezono 1-1-1, Tsukuba, Ibaraki, Japan
Source

Precision engineering. 2010, Vol 34, Num 1, pp 43-48, 6 p ; ref : 8 ref

CODEN
PREGDL
ISSN
0141-6359
Scientific domain
Mechanical engineering; Metallurgy, welding
Publisher
Elsevier, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
Pressure control Pressure differential sensor Pressure regulator Vibration isolation table
Keyword (fr)
Amortisseur pneumatique Capteur mesure Capteur pression différentielle Capteur pression Commande pneumatique Contrôle vibration Ecoulement laminaire Etude expérimentale Haute pression Isolation vibration Mécanique précision Précision élevée Servovalve Système actif Système pneumatique Table vibrante
Keyword (en)
Pneumatic damper Measurement sensor Differential pressure sensor Pressure sensor Pneumatic control Vibration control Laminar flow Experimental study High pressure Vibration isolation Precision engineering High precision Servovalve Active system Pneumatic system Vibrating table
Keyword (es)
Amortiguador neumático Captador medida Sensor presión diferencial Captador presión Mando neumático Control vibración Flujo laminar Estudio experimental Alta presión Aislamiento vibración Mecánica precisión Precisión elevada Servoválvula Sistema activo Sistema neumático Mesa vibrante
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G10 General theory

Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G80 Instrumentation for fluid dynamics

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Mechanical engineering. Mechanical construction. Handling Physics : fluid mechanics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
22102996

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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