Monte Carlo Simulation to Determine the Measurement Uncertainty of a Metrological Scanning Probe Microscope Measurement
- Author
- KREUTZER, Ph1 ; DOROZHOVETS, N1 ; MANSKE, E1 ; FÜSSL, R1 ; JÄGER, G1 ; GRÜNWALD, R1
[1] Technische Universität Ilmenau, Institute of Process Measurement and Sensor Technology, P.O. Box 100 565, 98684 Ilmenau, Germany - Conference title
- Scanning microscopy 2009 (4-7 May 2009, Monterey, California, United States)
- Conference name
- Scanning microscopy (Monterey CA ; 2009)
- Author (monograph)
- Postek, Michael T (Editor)
SPIE, United States (Organiser of meeting)
National Institute of Standards and Technology, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7378 ; 1Vol ; 737816.1-737816.12 ; ref : 17 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7654-8 0-8194-7654-4
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capteur mesure Incertitude mesure Interférométrie optique Microscope balayage Méthode Monte Carlo Méthode mesure Positionnement Répétabilité Simulation numérique 0130C 0760L 0778
- Keyword (en)
- Measurement sensor Measurement uncertainty Light interferometry Scanning microscope Monte Carlo methods Measuring methods Positioning Repeatability Digital simulation
- Keyword (es)
- Captador medida Microscopio barrido Repetibilidad
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60L Interferometers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G78 Electron, positron and ion microscopes, electron diffractometers and related techniques
- Discipline
- Metrology Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22129927
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.821794 
https://dx.doi.org/10.1117/12.821794
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