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Monte Carlo Simulation to Determine the Measurement Uncertainty of a Metrological Scanning Probe Microscope Measurement

Author
KREUTZER, Ph1 ; DOROZHOVETS, N1 ; MANSKE, E1 ; FÜSSL, R1 ; JÄGER, G1 ; GRÜNWALD, R1
[1] Technische Universität Ilmenau, Institute of Process Measurement and Sensor Technology, P.O. Box 100 565, 98684 Ilmenau, Germany
Conference title
Scanning microscopy 2009 (4-7 May 2009, Monterey, California, United States)
Conference name
Scanning microscopy (Monterey CA ; 2009)
Author (monograph)
Postek, Michael T (Editor)
SPIE, United States (Organiser of meeting)
National Institute of Standards and Technology, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7378 ; 1Vol ; 737816.1-737816.12 ; ref : 17 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-7654-8 0-8194-7654-4
Scientific domain
Electronics; Metrology and instrumentation; Optics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Capteur mesure Incertitude mesure Interférométrie optique Microscope balayage Méthode Monte Carlo Méthode mesure Positionnement Répétabilité Simulation numérique 0130C 0760L 0778
Keyword (en)
Measurement sensor Measurement uncertainty Light interferometry Scanning microscope Monte Carlo methods Measuring methods Positioning Repeatability Digital simulation
Keyword (es)
Captador medida Microscopio barrido Repetibilidad
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60L Interferometers

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G78 Electron, positron and ion microscopes, electron diffractometers and related techniques

Discipline
Metrology Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
22129927

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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