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Monte Carlo simulation of ionized impurity scattering process in bulk silicon

Author
SPERANSKY, Dmitrii1
[1] Belarusian State University, Nezavisimosti 4, 220030, Minsk, Belarus
Conference title
Twelfth International Workshop on Nanodesign Technology and Computer Simulations (23-27 June 2008, Minsk, Belarus)
Conference name
International Workshop on Nanodesign Technology and Computer Simulations (12 ; Minsk 2008)
Author (monograph)
Melker, Alexander I (Editor); Nelayev, Vladislav V (Editor)
Belarusian State University of Informatics and Radioelectronics, Micro- and Nanoelectronics Dept, Byelorussia (Organiser of meeting)
Motorola, inc (Organiser of meeting)
SPIE, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7377 ; 1Vol ; 737717.1-737717.5 ; ref : 7 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-7653-1 0-8194-7653-6
Scientific domain
Electronics; Metrology and instrumentation; Nanotechnologies, nanostructures, nanoobjects; Optics; Condensed state physics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Conception Diffusion impureté Etude comparative Evaluation performance Matériau dopé Mobilité électron Modélisation Méthode Monte Carlo Nanotechnologie Silicium Simulation numérique Simulation ordinateur 0130C 0705T
Keyword (en)
Design Impurity scattering Comparative study Performance evaluation Doped materials Electron mobility Modelling Monte Carlo methods Nanotechnology Silicon Digital simulation Computerized simulation
Keyword (es)
Estudio comparativo
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G05 Computers in experimental physics / 001B00G05T Computer modeling and simulation

Discipline
Metrology Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
22130246

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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