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Mounting Methodologies to Measure EUV Reticle Nonflatness

Author
SIVA BATTULA, Venkata1 ; ZEUSKE, Jacob R1 ; ENGELSTAD, Roxann L1 ; VUKKADALA, Pradeep1 ; MIKKELSON, Andrew R1 ; VAN PESKI, Chris K2
[1] UW Computational Mechanics Center, Mechanical Engineering Department 1513 University Ave., University of Wisconsin, Madison, WI 53706, United States
[2] Van Peski Consulting, 108 Palo Duro Drive, Cedar Creek, TX 78612, United States
Conference title
25th European Mask and Lithography Conference (12-15 January 2009, Dresden, Germany)
Conference name
European Mask and Lithography Conference (25 ; Dresden 2009)
Author (monograph)
Behringer, Uwe F. W (Editor)
VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Germany (Organiser of meeting)
BACUS, Technical group, Germany (Organiser of meeting)
SPIE, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7470 ; 1Vol ; 747014.1-747014.14 ; ref : 3 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-7770-5 0-8194-7770-2
Scientific domain
Electronics; Optics; Physics
Publisher
SPIE, Bellingham WA
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Formation motif Lithographie UV Lithographie Masque Rayonnement UV extrême Répétabilité Surface arrière 0130C 4282C
Keyword (en)
Patterning Ultraviolet lithography Lithography Masks Extreme ultraviolet radiation Repeatability Back surface
Keyword (es)
Repetibilidad Superficie atrás
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides

Discipline
Electronics Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
22130548

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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